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| Cosmovac Industrial Co., Ltd. |
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Item Number:
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NAPE500 |
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Product Name:
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Plasma cleaning, etching equipment |
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Description:
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1. Vacuum dry etching and plasma cleaning
2. Suitable for mass production & lab
3. Appliable in semiconductors, optical disks, etc
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Features:
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Surface cleaning using plasma
Etching projects |
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Specification:
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1. chamber size：500*600*500mm
2. etching zone：O400*400
3. bias：DC 1A/1KV
4. operation：auto/manual
5. ultimate pressure：<1.33 pa
6. power：3O 220V/15KVA
7. gas：depend on application |
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Safety
Approval:
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Other
Description:
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Pumping System: Rotary Pump & Booster Pump
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