Accomplish auto lamp aluminum evaporation coating and HMDS polymerization coating at a time, and plasma hydrophilic process is available.
Adopt PLC module, touch panel GUI, process variable setting to get fully auto-running.
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Equipment Capability
Production Cycle Time: 600 sec/batch
Ultimate Pressure: 5x10-3 Pa
Throughput: 80,000 pcs/month
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Vacuum Exhaust System
Magnetic Coupling Drive
Automation Control Panel
Double Cathode CVD System
Evaporation Electrode
Planet rotary mechanism with 6-axis of rotation
